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Sakata Area
SMS

Wafer Fabrication

Sakata Area

  

 


    
  Technology:       

CMOS process

D/R: 0.8-0.35um

Gate: MoSi, WSi

Metal : 1-4 layers

  
 


 
   
 
   
 

      
 


 
  Technology:  CMOS process

D/R: 0.35-0.25um

Gate: WSi

Metal : 1-5 layers
   

   

   

 
 


 
  Technology: CMOS process

D/R: 0.18-0.13um

Gate: WSi, CoSi

Metal : 1-6 layers
   

   

   

 
Sakata Area